presents the achievement in 3D/2.5D MEMS probe card development for WAT test (Wafer Acceptance Test, WAT) and provides users the positive effects on test efficiency and reliable results.

Wafer testing is conducted using Automatic Test Equipment (ATE) along with test infrastructures such as the Prober Interface Board (PIB), signal tower, and probe card. In this paper, we present the ...

If the product requires wafer level testing, then more hardware is needed. In addition to a manual test rig, I will also have been designing a probe card, which will connect to the ATE head with a ...