Ceramics account for over 90% of the materials used in the internal components of semiconductor etching equipment. One of the main reasons is their superior plasma resistance compared to other ...

Inspired by the feet of the gecko lizard, researchers have tweaked a conventional plasma etching chamber so that it can make reusable adhesives that could have applications in the semiconductor ...

Researchers from Singapore’s Nanyang Technological University and its Agency for Science, Technology and Research are ...

The Korea Research Institute of Standards and Science (KRISS) has successfully developed a system that diagnoses the lifetime of parts used in the semiconductor plasma processes in real time.

It’s a problem that few of us will likely ever face: once you’ve built your first homemade integrated circuit, what do you do next? If you’re [Sam Zeloof], the answer is clear: build better ...

Lam Research announced on the 11th the launch of its etching equipment, 'Akara,' which can be applied to the three-dimensional (3D) semiconductor manufacturing process. According to Lam Research ...