A study reveals microwave annealing enhances hydrogen activation in hydrogen-rich dielectrics, offering a superior alternative to conventional N2 annealing.

The Ulvac Technology MILA 3000 Rapid Thermal Annealing (RTA) vacuum furnace is a programmable tabletop furnace for high temperature materials testing and analysis. It can heat samples to 1200°C in ...

Unlike the traditional tube-furnace annealing at 875 °C, rapid thermal annealing (RTA) and laser annealing offer flexibility, high throughput, and control of the heating and cooling rates and holding ...

Effects of rapid thermal annealing (RTA) on sub-100 nm p/sup +/-n Si junctions fabricated using 10 kV FIB Ga/sup +/ implantation at doses ranging from 10/sup 13/ to 10/sup 15/ cm/sup -2/ are reported.

This article discusses the role of rapid thermal processing (RTP) in the semiconductor manufacturing process.

3D-Micromac AG, the industry leader in laser micromachining and roll-to-roll laser systems for the semiconductor, photovoltaic, medical device and electronics markets, today introduced the first ...