Flash Lamp Annealing (FLA) is a well-known technique for millisecond annealing. In forming ultra-shallow junctions, FLA can provide high activation levels with precise diffusion control in the ...

The fabrication of n-channel SiC IGBTs necessitates the use of p-type SiC substrates with low resistivity. The presence of foreign polytypes, inhomogeneous doping, and difficulties in achieving heavy ...