In plasma etching process, various physical and chemical mechanisms affect the feature profile evolution. The relative importance of these mechanisms is uncertain. In order to study the physics ...

ITER is building a boronisation system requiring over 1 km of gas injection lines to reduce plasma impurities.

Research results of ion - initiated etching processes of polymer films based on polyimide in oxygen plasma, sulfur hexafluoride and oxygen-argon mixtures of low pressure (around 10-12 Pa) have been ...