Until 2018, DRAM peripheral transistors were predominantly made in planar logic MOSFET technology with poly-Si/SiO 2 or ...
A technical paper titled “Buried power rail to suppress substrate leakage in complementary field effect transistor (CFET)” ...
From Stacked Nano-Sheet to Fork-Sheet and CFET Devices” was published by researchers at Imec and Ghent University, et al.
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