This groundbreaking technique, also referred to as MacEtch or MACE, provides ultra-high anisotropy etching that’s free from damage. It is an innovative approach that effectively addresses the ...

To improve data storage, researchers are perfecting 3D NAND flash memory, which stacks cells to maximize space. Researchers ...

"Cryo etch with the hydrogen fluoride plasma showed a significant ... "This is an essential step in gaining a better ...

Semiconductor manufacturing is a precise process requiring many specific steps. For example, fluorinated gases support everything from surface-etching activities to process consistency. Although many ...

Founded in 1980 by David Lam, the man who pioneered semiconductor etching technology, Lam Research (NASDAQ:LRCX) is one of the leading providers of wafer fabrication equipment used to make ...