It shows a line profile drawn on top of an SEM image of a photoresist line. (Image: Hitachi High-Tech) CD-SEM is an essential metrology tool in semiconductor manufacturing for process control and ...
ASML Holding N.V. (ASML) and imec, a research and innovation hub in nanoelectronics and digital technologies, announce that ...
“SEMI-PointRend: Improved Semiconductor Wafer Defect Classification and Segmentation as Rendering.” arXiv preprint arXiv:2302.09569 (2023). To be published by SPIE in the proceedings of Metrology, ...
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