This is a maskless technique (similar to projection lithography) to create patterns in a photosensitive resin (photoresist). This is a common step in many microfabrication operations like ...

The physical interaction between two or more systems, also known as coupling, can give rise to unique and unexpected effects.

(Image: Hitachi High-Tech) CD-SEM is an essential metrology tool in semiconductor manufacturing for process ... In EUV lithography, which is used to create the intricate patterns of modern integrated ...

After cleaning with the Solarus II system, amorphous surface damage and crosslinking are eliminated. Protocol: hydrogen and oxygen; duration: 5 min; sample: a semiconductor device; SEM image.