Gases used: The rapid thermal processor (RTP) or rapid thermal annealer allows ... a dirty furnace as it has been used for a range of materials, including metal and annealing photoresists.

for thermal anneal, graphene growth, Si thermal oxidation, and dopant diffusion. Rapid thermal anneal (with argon and nitrogen) is also available.

for thermal anneal, graphene growth, Si thermal oxidation, and dopant diffusion. Rapid thermal anneal (with argon and nitrogen) is also available. Various thin-film deposition tools, including PVD ...

Thermal annealing was performed under N 2 at 450 °C in a quartz tube. Microwave annealing was performed at a microwave frequency of 2.45 GHz at 1000-watt power. The prepared specimens were ...