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ITER is building a boronisation system requiring over 1 km of gas injection lines to reduce plasma impurities.
Once inside, the diborane decomposes and deposits on the plasma-facing walls via a glow-discharge-assisted method, where a ...
In plasma etching process, various physical and chemical mechanisms affect the feature profile evolution. The relative importance of these mechanisms is uncertain. In order to study the physics ...
Asia-Pacific: The APAC region dominates the global bromine derivatives market, with countries like China and India driving ...