The etching and characterization room contains a suite of tools for dry etching and characterization of samples. This includes three dry etchers with a range of capabilities, while characterization ...

Understand and designing microfabrication processes based on photolithography and deposition/etching steps. Micro Electro Mechanical Systems (MEMS) has demonstrated powerful capabilities in many ...

Atomic force microscopy, laser ablation, and etching with a witches brew of toxic chemicals: sounds like [Zachary Tong] has been playing in the lab again, and this time he found a way to fabricate ...

Micromachines, Recent Advances in Reactive Ion Etching and Applications of High-Aspect-Ratio Microfabrication Journal of Sensor Science and Technology, Optimization of Etching Profile in Deep-Reactive ...

Fundamentals of micromachining and microfabrication techniques, including planar thin-film process technologies, photolithographic techniques, deposition and etching techniques, and the other ...

Understand and designing microfabrication processes based on photolithography and deposition/etching steps. Micro Electro Mechanical Systems (MEMS) has demonstrated powerful capabilities in many ...