Tech Xplore on MSN

New semiconductor etching process achieves five-fold speed improvement

After more than a decade of research and development, Tokyo Electron Miyagi Ltd. has introduced an innovative semiconductor etching method that achieves etch rates up to five times faster than ...
AZOM

Bosch Process for Etching Micro-Mechanical Systems (MEMS)

The fundamentals of a good Bosch etching system are described below; There are a number of significant features of the equipment used for Bosch processing which differ from normal ICP systems: In ...
Semiconductor Engineering

Semiconductor Device Manufacturing Process Challenges And Opportunities

Major processes in semiconductor wafer fabrication: 1) wafer preparation, 2) pattern transfer, 3) doping, 4) deposition, 5) etching, and 6) packaging. The process of creating semiconductors can be ...
American Machinist

Photochemical Etching – and How It’s Done

Photochemical etching is a machining technique that leverages the principles behind photography to shape a piece of sheet metal and turn it into a finished product or component. The modern form of ...
AZOM

Deep Reactive Ion Etching — PlasmaPro 100 Estrelas DRIE

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