Gases used: The rapid thermal processor (RTP) or rapid thermal annealer allows ... a dirty furnace as it has been used for a range of materials, including metal and annealing photoresists.

for thermal anneal, graphene growth, Si thermal oxidation, and dopant diffusion. Rapid thermal anneal (with argon and nitrogen) is also available.

for thermal anneal, graphene growth, Si thermal oxidation, and dopant diffusion. Rapid thermal anneal (with argon and nitrogen) is also available. Various thin-film deposition tools, including PVD ...

A group of scientists from the Technical University of Denmark has fabricated a solar cell based on selenium by replacing thermal annealing with a new laser-annealing strategy. “In our work ...