RTP is a semiconductor manufacturing technique in which silicon wafers are heated at temperatures above 1000 o C using lasers or high-intensity lamps for a few seconds. During the cooling of the ...
Various thermal processing equipment is available for oxidation, chemical vapor deposition, and annealing. The Protemp furnaces are horizontal quartz tubes that can process many wafers at once in many ...
A recent study published in Advanced Energy and Sustainability Research demonstrated the effectiveness of microwave annealing in activating hydrogen within hydrogen-rich dielectrics (AlO x, SiN y, and ...
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