The team has just determined that its approach – involving plasma nitridation of the SiC surface, sputter deposition of SiO 2 ...

Dusty plasma is plasma containing small particles in suspension. In industry, dust is a contaminant and this is a motivation for its removal from semiconductor processing ... and by photoelectric ...

To store ever more data in electronic devices of the same size, the manufacturing processes for these devices need to be ...

Nature Research Intelligence Topics enable transformational understanding and discovery in research by categorising any document into meaningful, accessible topics. Read this blog to understand ...

Accelerate tool development and reduce the consumption of physical resources like silicon wafers, chemicals, and gases.