News
The two main categories of vapor deposition are physical vapor deposition (PVD) and chemical vapor deposition (CVD). Physical Vapor Deposition Various PVD methods make use of the same essential steps ...
Physical vapor deposition has been the workhorse of the back-end-of-line for the copper damascene process. In this process, a structure undergoes a diffusion barrier etch step. Then, a via dielectric ...
Some results have been hidden because they may be inaccessible to you
Show inaccessible results
Feedback