Isotropic vs. anisotropic etching. Most wet etching methods are isotropic to some degree, which can lead to problems like undercutting. With the notable exception of scratching out traces with an ...
While both techniques are used in nanotechnology for fabricating nanostructures, wet etching relies on liquid etchants and offers unique advantages, such as high selectivity and the ability to create ...
Schematic representation of the atomic layer etching (ALE) process, which is used to precisely shape materials at the nanoscale. At the top, we see two types of ALE: (left) isotropic etching, which ...
To obtain anisotropic profiles, the DSiE technique or the Deep Reactive Ion Etching (DRIE) repeatedly integrates isotropic silicon etching and passivation steps. With the help of a high-density plasma ...
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