AZOM

Deep Reactive Ion Etching — PlasmaPro 100 Estrelas DRIE

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Hackaday

Garage Semiconductor Fab Gets Reactive-Ion Etching Upgrade

It’s a problem that few of us will likely ever face: once you’ve built your first homemade integrated circuit, what do you do next? If you’re [Sam Zeloof], the answer is clear: build better integrated ...
EDN

Through-wafer via leads STS to extend etch process

LONDON — Surface Technology Systems plc, a developer of plasma etch systems, has announced that it intends to build a Deep Reactive Ion Etch (DRIE) system suitable for 300-mm diameter wafers. The ...
AZOM

Large Area Slanted Etching for Augmented Reality

In this paper, we describe how Oxford Instruments Plasma Technology solution delivers controlled processing of slanted gratings used as light coupler for Augmented Reality waveguide combiners. We ...
AppleInsider

iPad Pro with OLED may be more expensive because of dry etching

There are a few methods in dry etching, such as isotropic radial etching, reactive ion etching, sputter etching, and ion milling. The intricacies of each are beyond the scope of this article, and ...
EDN

Applied offers deep-trench silicon etch chamber for sub-100-nm DRAM processes

SANTA CLARA, Calif.–Applied Materials Inc. today announced a new silicon etch chamber for 200- and 300-mm wafer DRAM fabs needing deep-trench etching technology for 100-nm and below process geometries ...